Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region
نویسندگان
چکیده
منابع مشابه
Towards 10-nm Soft X-Ray Zone Plate Fabrication
In this paper the latest efforts to improve our nanofabrication process for soft x-ray zone plates is presented. The resolving power, which is proportional to the smallest outermost zone width of the zone plate, is increased by introducing cold development of the electron beam resist that is used for the patterning. With this process we have fabricated Ni zone plates with 13-nm outermost zone a...
متن کاملFabrication of Fresnel zone plates for hard X-rays
A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 lm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed. 2007 Elsevier B.V. All rights reserved.
متن کاملDemonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy.
To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that ...
متن کاملSub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate.
Improving the resolution in x-ray microscopes is of high priority to enable future applications in nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation in laboratory microscopes difficult. We present a laboratory x-ray microscope based on a compound zone plate. The compound zone plate utilizes multiple diffraction orders to achieve high r...
متن کاملTwo-step hard X-ray focusing combining Fresnel zone plate and single-bounce ellipsoidal capillary.
A two-step focusing set-up combining a Fresnel zone plate with an ellipsoidal capillary is presented. It is shown that, in addition to the anticipated gain in flux, the employment of the prefocusing micro-optic makes optimal use of the elliptical shape of the capillary by almost eliminating aberrations. A small cross section of the prefocused beam allows a tiny fraction of the capillary surface...
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ژورنال
عنوان ژورنال: X-Ray Optics and Instrumentation
سال: 2010
ISSN: 1687-7632,1687-7640
DOI: 10.1155/2010/824387